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1

Etching process of hydrogenated amorphous carbon (a-C:H) thin films in a dual ECR–r.f. nitrogen plasma

Hong, Junegie, Turban, Guy

Journal:

Diamond and Related Materials

Year:

1999

Language:

english

File:

PDF, 217 KB

english, 1999

2

In situ deposition and etching process of a-C:H:N films in a dual electron cyclotron resonance–radio frequency plasma

Hong, Junegie, Granier, Agnès, Goullet, Antoine, Turban, Guy

Journal:

Diamond and Related Materials

Year:

2000

Language:

english

File:

PDF, 249 KB

english, 2000

3

A kinetic model for radio frequency plasma-activated chemical vapour deposition

Guy Turban, Yves Catherine

Journal:

Thin Solid Films

Year:

1978

Language:

english

File:

PDF, 404 KB

english, 1978

4

Ellipsometry and Raman study on hydrogenated amorphous carbon (a-C:H) films deposited in a dual ECR-r.f. plasma

Junegie Hong, Antoine Goullet, Guy Turban

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 160 KB

english, 1999

5

Optical characterization of hydrogenated amorphous carbon (a-C:H) thin films deposited from methane plasma

Junegie Hong, Antoine Goullet, Guy Turban

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 241 KB

english, 2000

6

Etching of SiO[sub 2] and Si in fluorocarbon plasmas: A detailed surface model accounting for etching and deposition

Gogolides, Evangelos, Vauvert, Philippe, Kokkoris, George, Turban, Guy, Boudouvis, Andreas G.

Journal:

Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 1.35 MB

english, 2000

7

Dynamic analyses in mass spectrometry of SF6 plasma during etching of silicon

Nobuki Mutsukura, Guy Turban

Journal:

Year:

1989

Language:

english

File:

PDF, 442 KB

english, 1989

8

Langmuir probe measurements in an inductively coupled plasma: Electron energy distribution functions in polymerizing fluorocarbon gases used for selective etching of SiO[sub 2]

Gaboriau, Freddy, Peignon, Marie-Claude, Cartry, Gilles, Rolland, Laetitia, Eon, David, Cardinaud, Christophe, Turban, Guy

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2002

Language:

english

File:

PDF, 380 KB

english, 2002

9

Surface and plasma simulation of deposition processes: CH4 plasmas for the growth of diamondlike carbon

Mantzaris, Nikolaos V., Gogolides, Evangelos, Boudouvis, Andreas G., Rhallabi, Ahmed, Turban, Guy

Journal:

Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 489 KB

english, 1996

10

Measurements of rf bias effect in a dual electron cyclotron resonance-rf methane plasma using the Langmuir probe method

Hong, Junegie, Granier, Agnès, Leteinturier, Christiane, Peignon, Marie-Claude, Turban, Guy

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2000

Language:

english

File:

PDF, 381 KB

english, 2000

11

Deposition of amorphous nitrogenated carbon films using an alternate plasma deposition method in a dual electron cyclotron resonance-radio frequency plasma

Hong, Junegie, Turban, Guy

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1999

Language:

english

File:

PDF, 312 KB

english, 1999

12

Mass spectrometric study of SF6-N2plasma during etching of silicon and tungsten

Nobuki Mutsukura, Guy Turban

Journal:

Plasma Chemistry and Plasma Processing

Year:

1990

Language:

english

File:

PDF, 671 KB

english, 1990

13

Electronic and optical investigation of hydrogenated amorphous carbon (a-C:H) by X-ray photoemission spectroscopy and spectroscopic ellipsometry

Junegie Hong, Soonil Lee, Christophe Cardinaud, Guy Turban

Journal:

Journal of Non-Crystalline Solids

Year:

2000

Language:

english

File:

PDF, 208 KB

english, 2000

14

Dry Etching of Polyimide in O[sub 2]-CF[sub 4] and O[sub 2]-SF[sub 6] Plasmas

Journal:

Journal of The Electrochemical Society

Year:

1983

Language:

english

File:

PDF, 844 KB

english, 1983

15

Plasma Deposition of Diamond-Like Carbon and Carbon-Nitride Films in an Electron Cyclotron Resonance-Radio Frequency Discharge

Turban, Guy, Zarrabian, Marjan, Hong, Junegie

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 663 KB

english, 1998

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